• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    There is provided a vacuum valve with a bellows (8) comprising a disc-shaped valve element and a valve seat such that a main flow path of the vacuum valve can be opened or closed by the valve element by the valve element being in contact with or away from the valve seat moved away by means of a drive unit which drives the valve element by means of a rod which is enclosed by this bellows (8), said bellows (8) separating the rod from the main flow path. The bellows (8) is alternately and continuously along a wall of a metallic tube and in the axial direction of this metallic tube with annular valley areas (21) which bulge inwardly of the metallic tube, and with annular mountain areas (22), which bulge outwards of this metallic tube provided. Valley R / Mountain R, which is the quotient from Tal R to Mountain R, lies in the value range of 1.15 and 1.70, where Tal R is the radius of the curve of the valley area in cross section, and Mountain R is the radius of the curve of the mountain Area in cross section is.
    公开号:CH704934B1
    申请号:CH00671/12
    申请日:2012-05-11
    公开日:2017-11-15
    发明作者:Kanzaka Ikuo
    申请人:Smc Corp；
    IPC主号:
    专利说明:

    Description: The present invention relates to a bellows-type vacuum valve according to the preamble of claim 1, and more particularly to a bellows-type vacuum valve for separating a drive unit for driving a valve member from a main flow path under negative pressure of air.
    In general, as disclosed in Japanese Unexamined Patent Application Publication No. 2004-340344, for example, in a vacuum valve, also known as a high-vacuum L-valve, a drive unit for a valve element by means of a compression-molded bellows from one under Air negative pressure main flow path isolated. This essentially corresponds to the vacuum valve according to FIG. 3, with the exception of the detailed construction of the bellows.
    This structure will be described in detail here. The vacuum valve comprises a first main port, a second main port, wherein either the first main port is connected to a vacuum chamber and the second main port is connected to a vacuum pump, or vice versa, an annular valve seat which connects into a main flow path connecting the above-mentioned main ports of a housing. a disc-shaped valve element which comes into contact with or from the valve seat, thereby opening or closing the main flow path, and a drive unit for axially driving a rod, which rod is connected to the valve element to cause the valve element to perform an opening and closing movement. In order to separate the drive unit of the valve member from the main flow path running in the housing and under vacuum, an expandable and contractible molded bellows is provided between the periphery of the disc-shaped valve member and the housing so as to surround the rod.
    Typically, the above-described known vacuum valve bellows is manufactured by means of hydrostatic forming, wherein a plurality of annular moldings are arranged at equal intervals around an unprocessed metal pipe and this is sealed at both ends in liquid-tight manner, and in the unprocessed pipe an under High-pressure liquid is introduced, which causes those parts of the outer edge of the unprocessed tube, which are not in contact with the annular moldings, bulge outwards and the distance between the plurality of annular moldings is reduced, and the areas of the unprocessed Pipe, which have been arched outward annular, act as mountain areas, and the annular areas, which were not curved, act as valley areas.
    Typically, this deformed bellows is shaped so that the radius of the curve of the mountain area in cross section (R) is equal to the radius of the curve of the valley area in cross section (valley R). When the deformed bladder is mounted in a vacuum valve and used and the bladder expands and contracts, the applied stress causes a fatigue fracture in the valley areas, rather than in the mountain areas. Usually, a crack is generated in the central region of the side surface of a valley region of the bellows (region a in FIG. 1), resulting in the end of life.
    In order to overcome the above-described problem of fatigue failure in the valley region of the reshaped bellows, the present inventor made experiments and computer simulations to determine the maximum voltage and changes in the distribution thereof caused by changes in various parameters and, more specifically, to investigate balancing the deformability produced by changing the number of mountain regions of the bellows, the thickness of the metallic tube forming the bellows, and the thickness of a holder at the end of the bellows. As a result, it has been found that simple and effective means for balancing the stresses acting on the outer annular mountain areas and the inner annular valley areas when the vacuum valve bellows expand and contract as much as possible, are therein to balance the radii of the curve in the valley and mountain areas in cross section (valley R and mountain R) relative to each other to extend the life of the bellows.
    The present invention is based on the above findings, and a technical object thereof is to provide a bellows-type vacuum valve for relieving, in this bellows, the stresses on the inner annular valley areas and the outer annular hill areas When the vacuum valve bellows expand and contract as much as possible, they act to lengthen the life of the bellows by adjusting the radii of the curve of the valley and mountain regions in cross-section to an appropriate range of values.
    In addition, the vacuum valve bellows should be used mainly such that the axial length of the bellows, in which the valve element in a position in which it is in contact with the valve seat, as the free length of the bellows acts or such that the axial length of the bellows, in which the valve element in a position in which it is in contact with the valve seat, acts as the length which is extended from the free length to a position at which the valve element is in contact with the valve seat , Therefore, in any case, it is desirable that the stresses acting on the valley and mountain ranges when the bellows is expanded and contracted be made as equal as possible. As a result of a study of the above computer simulation performed by the present inventor, it has been found that, as described in more detail below, an effective way to compensate for the degree of metal fatigue as a result of repeated tension is in determining an appropriate range of values of the quotient from the radii of the curve of the valley and mountain areas in cross section (valley R / mountain R), to the stress amplitude in the valley and mountain areas, while the valve element is performing an opening / closing movement, regardless How far the bellows is pulled apart (compression ratio, described below) when the valve member is in a position in contact with the valve seat.
    On the basis of the above findings, therefore, another technical purpose of the present invention is to obtain a suitable ratio of Tal R to Berg R.
    To this end, the present invention provides a bellows type vacuum valve which is fixed to this vacuum valve and which includes a main flow path which is opened or closed with a disc-shaped valve member which is in contact with or movable away from a valve seat can be, and a drive unit to drive the valve member via a rod, such that the rod is surrounded by this bellows to separate the main flow path of the drive unit. The bellows is alternately and continuously along a peripheral wall of a metallic tube and in the axial direction of this metallic tube, with annular valley areas which bulge inwardly of the metallic tube, and with annular mountain areas extending outwardly of this metallic tube buckle, provided. Valley R / mountain R, which is the quotient from valley R to mountain R, lies in the value range of 1.15 and 1.70, where valley R is the radius of the curve of the valley area in cross-section, in a state in which no external forces from Stab on the bellows act.
    For the above vacuum valve bellows, it is more advantageous if the R quotient lies in the value range of 1.20 and 1.55.
    In a preferred embodiment of the vacuum valve according to the invention with bellows, the axial length of the bellows of the free length of the bellows, when the valve element is in a position in contact with the valve seat, and the free length of the bellows to the total amount of the deflection ( hereinafter also referred to as total deflection amount) is compressed when the valve element is in its fully open position.
    Further, in a further preferred embodiment of the inventive vacuum valve with bellows, when the valve element is in a position in contact with the valve seat, the bellows in a state in which it is pulled apart from the free length of the bellows except for one Position in which the valve member is in contact with the valve seat and, when the valve member is in a fully open position, the bellows from the free length of the bellows by the total amount of the deflection (hereinafter also called total deflection amount) is compressed.
    In this case, the length by which the bellows is pulled apart when the valve member is in a position in contact with the valve seat may be equal to or less than the length with which the bellows may be compressed when the valve member in its fully open position.
    In addition, in a preferred embodiment of the present invention, the metallic tube which forms the bellows, formed by deep drawing as usual from a thin metallic sheet of stainless steel.
    In accordance with the invention described above in detail and using simple means by which the metallic tube is formed by means of hydrostatic forming and by adjusting the Radii the curve of the valley and mountain areas of the vacuum valve bellows in cross section relative to one another and by adjusting the quotient of the radii of the curve to a suitable value range as described above, the stresses acting on the valley and mountain regions can be made as equal as possible, thereby increasing the life of the bellows.
    Furthermore, and in accordance with the invention, and by determining an appropriate value range for the quotient of the radii of the curve of the valley and mountain ranges (valley R / mountain R), with reference to the voltage amplitudes in the valley and mountain area, and while the valve member performs an opening / closing movement, a bellows in which the degree of metal fatigue due to repeated stresses is balanced can be provided, regardless of how much the bellows is deflected (compression quotient) the valve element is in a position in contact with the valve seat.
    Fig. 1 shows a vertical cross-sectional view through the relevant part of an embodiment of a vacuum valve bellows according to the invention;
    Fig. 2 is a perspective sectional view of the relevant part of the embodiment;
    FIG. 3 shows a cross-sectional view of a high-vacuum L-valve with the vacuum valve bellows according to the invention; FIG.
    4 shows a data diagram of the stress amplitude of the bellows, according to Table 1, as a function of the R ratio:
    5 shows a data plot of the stress amplitude of the bellows at a compression ratio of 75%, according to Table 2, as a function of the R ratio;
    6 shows a data plot of the stress amplitude of the bellows at a compression ratio of 50%, according to Table 3, as a function of the R ratio;
    7 shows a diagram of the maximum stresses of the bellows at different compression ratios as a function of the R ratio.
    1 and 2 show an embodiment of a novel vacuum valve bellows, and Fig. 3 shows an exemplary construction of a vacuum valve with bellows.
    At first and with reference to Fig. 3, the structure of the vacuum valve as used for attaching the vacuum valve bellows described above will be described. This vacuum valve comprises a first main port 3, a second main port 4, wherein either the first main port 3 is connected to a vacuum chamber and the second main port 4 is connected to a vacuum pump, or vice versa, an annular valve seat 5, which into a main flow path 2, the main ports 3 and 4 of a housing 1 connects, is formed, a disk-shaped valve element 6, which contacts the valve seat 5 or distance, thereby opening the main flow path 2 or closes, a rod 7 which is connected to the valve element 6, and a drive unit 10th to drive the rod 7 axially, to let the valve member 6 perform an opening and closing movement.
    The structure of a drive system in which the drive member 10 drives the valve member 6 via the rod 7, will now be described. In this drive system, one end of the driving rod 7 is mounted centrally on the rear side of the valve element 6, and the rod 7 is axially driven by the driving part 10. Because it is necessary, the driving part 10, which is formed separated from the housing 1 for the main flow path 2, of the valve element 6 flowing around the main flow path 2, which is opened or closed by the valve element 6 and which valve element 6 comes into contact with the valve seat 5 or moving away from it, an expandable and contractible bellows 8 is provided such that the rod 7 is sheathed. Thus, when the vacuum pump is in operation, the outside of the bellows 8, which forms the main flow path 2, exposed to an air pressure and the interior of the bellows is exposed to atmospheric pressure. In addition, a helical return spring 9 is provided between the back of the valve element 6 and a partition 11 of the drive unit 10, which forces the valve element 6 in a direction in which the valve is closed.
    The rod 7 protrudes through the housing 1 and is disposed along the central axis thereof, and the base end thereof extends through the partition wall 11 of the drive unit 10 and is connected to a piston 13 arranged in a cylinder chamber 12. In addition, a stopper sleeve 17 is fixed to the rod 7 and to the back of the valve element 6, which stopper sleeve 17 comes with its end with a central tube part 11a of the partition 11 in contact and thereby limits the full open position of the valve element 6 and determines the stroke of the valve element 6 , In addition, the piston 13 defines with the partition 11 a pressure chamber 14. Because the pressure chamber 14 communicates with a working port 16, which working port 16 is mounted in a side surface of the cylinder body 15, the valve element 6 by means of the supply of a pressurized fluid from the outside to the working port 16 moves in a direction away from the valve seat 5.
    The expandable and contractible bellows 8 is designed so that it encloses the rod 7 and the return spring 9 at the rear side of the valve element 6. One end of the bellows 8 is attached to the rear side of the valve element 6 in an airtight manner, and the other end of the bellows 8 is fixed to a support plate 8 a which is disposed between an end of the housing 1 and the partition wall 11. The bellows 8 is made of a metallic tube formed by deep-drawing a thin metallic arc of stainless steel. The bellows 8 is a deformed bellows in which annular valley portions 21 that bulge inward and annular mountain portions 22 that face inwardly are formed alternately and continuously in the wall in the axial direction of the metallic tube.
    As mentioned above, in a conventional bellows vacuum valve, it tends to be more in the valley areas when stretching and contracting the bellows than in the mountain areas. Therefore fatigue fracture often occurs in the valley area during use, which ends the service life. On the other hand, in the molded bellows 8 of the present invention, an effective way to solve the above fatigue failure problem is to set the R quotient, which is the ratio of Tal R to R, to an appropriate range of values, and due to the below given results of the experiments and the computer simulation the R-quotient to a suitable value range, ie a range of values at which the stresses acting on the inner valley regions 21 and the outer mountain regions 22 when the bellows is expanded and contracted are as equal as possible.
    In conclusion, and in order to keep the stresses acting on the valley regions 21 and the mountain regions 22 as balanced as possible, it proves to be effective when in a state in which no external forces from the rod 7 on the 8 itself (free length) have the effect that the R quotient lies in the value range of 1.15 and 1.70, and preferably that the R quotient lies in the value range of 1.20 and 1.55.
    When the bellows 8 is mounted on the periphery of the rod 7 of the vacuum valve, it is used such that the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat 5, the free length of the Balges 8 itself corresponds. Thus, when the valving element 6 is in its fully open position, the axial length of the bellows 8 corresponds to a length reduced by the total amount of deflection relative to the free length of the bellows 8, and the bellows 8 is equal to the free length Displacement amount compressed.
    R-quotient data and others which will be described later are the data for the situation where the arrangement described above is performed.
    Note that the free length of the bellows may be chosen assuming that the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat, corresponds to the length which is opposite the free length of the bellows 8 is extended to a position in which the valve element 6 is in contact with the valve seat, and assuming that the axial length of the bellows when the valve element is in the fully open position, the free compressed by the amount of deflection Length of the bellows corresponds. This will be described in more detail below.
    Next, the results of the experiments and the computer simulation will be described in more detail below, which, on the basis of the data, confirm that the quotient R and others set to the above-described value range are effective.
    First, using bellows test pieces with an outer diameter D-ι of 120.0 mm, an inner diameter D2 of 94.5 mm, a pitch of 12.8 mm, a free length L of 160 mm, a thickness of 0.22 mm , and with 19 mountain ranges listed as worksheets 1 through 14 in Table 1, with the bellows test pieces having a range R value based on the radius of the graph and the respective valley R, mountain R values from 0.54 to 2.08, the stress and others on these test pieces described below were determined under conditions in which the ambient pressure inside the test piece bladder was at atmospheric pressure and the outside pressure thereof was vacuum.
    For each test piece, the voltage value (simulation value) applied to each of the central portions a and the outer peripheral portions b, the valley portions 21 and the central portions c, and the outer peripheral portions d, the mountain portions 22 is determined, in a state in which a compression displacement of 40 mm in the direction of the central axis was present and in the state in which the bellows test piece was left in a state of free length, so that only a difference between internal and external pressure acted , Moreover, for each test piece having the corresponding R quotient, the fluctuation rate of the stress in each of the regions a to d was determined in the case where the above compression displacement was given and in the case where it was left in the free length condition in other words, the voltage amplitude for each of the areas determined while the valve element 6 performed an opening / closing movement to the valve seat 5 and which results are shown in Table 1. It should be noted that values which are indicated in the table with a minus sign represent compression voltages.
    The voltage amplitude shows the rate of fluctuation of the voltage in each of the areas a to d during an opening / closing movement of the valve element 6. An increase in the fluctuation rate in any of the areas is undesirable because repeated application of significantly different voltages results in metal fatigue. However, even if the fluctuation rate is small, the voltage value itself must not exceed a certain limit. Accordingly, it is desirable to use such an R-quotient in which the fluctuation rate of the voltage is relatively small and in which the maximum voltage does not exceed a certain upper limit.
    Fig. 4 shows a graph of the voltage amplitude in each of the areas a to d listed in Table 1 as a function of the R-quotient. FIG. 4 shows, for an R quotient in the value range of 1.15 to 1.70, a relatively low value for the voltage amplitude in each of the regions a to d, and moreover that at the lower limit of the above value range of the R quotient the voltage amplitude in FIG Region a, where metal fatigue damage occurs in a conventional bellows, is substantially the same as the stress amplitude in region c, where the damage is relatively less likely. Furthermore, the voltage amplitude in the region d, where the possibility of the occurrence of metal fatigue is the second highest compared to the region a, is sufficiently small. Accordingly, from the viewpoint of avoiding metal fatigue due to repeated stress, the lower limit of the above-mentioned ranges can be said to be desirable.
    On the other hand, at the upper limit of the value range of the R quotient, the voltage amplitude in the region a is substantially the same as in the region d, and the values of the voltage amplitudes themselves are small. When the upper limit is exceeded, the voltage amplitude in the region d increases. So it can be said that, with a view to avoiding metal fatigue due to repeated stresses, the upper limit is also desirable.
    Furthermore, the maximum stresses in the respective areas a to d, with an R-quotient in the value range from 1.15 to 1.70, were investigated. The example of the worksheet 7 in Table 1 corresponds to a bellows of known type with a valley R and a mountain R of 2.0 mm each, and the maximum stress in the area a of the working template 7, which is most likely to be destroyed, is 599. In contrast is, in the examples of the working templates 9 to 12 in Table 1, which have an R-quotient in the range of 1.15 to 1.70, the maximum stress in the region a sufficiently smaller than that of the example of the working template 7. In particular, the maximum voltage which by assuming that the maximum stress, when the R-quotient is 1.15, which corresponds to the lower limit, proportionally changes between the values of the worksheet 8 and worksheet 9, 578, which is sufficiently smaller than the value of the example of FIG Working template 7. In addition, the maximum
    Tensions in the other areas b to d even smaller. As a result, it can be said that an R-quotient in the value range of 1.15 to 1.70 is effective in order to compensate as much as possible for stresses acting on the valley regions 21 and mountain regions 22.
    With reference to Fig. 4, a preferred range of values for the R-quotient should be considered. It can be said that it is desirable to use an R-quotient of 1.20 for the lower limit of the value range of the R-quotient at which the voltage amplitude in the region a where the possibility of damage is high is smaller than that Voltage amplitude in the region c, and consequently region a does not have the greatest voltage amplitude in comparison with the other regions; it may also be said that it is desirable to use an R-quotient of 1.55 for the upper limit of the R-quotient, at which in the region b, where the voltage amplitude falls to the minimum with increasing R-quotients, becomes negligible; it can also be said that the voltage amplitudes in the other regions a, c, and d have similar values and therefore the degree of metal fatigue due to repeated stresses is balanced; and consequently the value range of the R quotient is set to 1.20 to 1.55.
    Table 1
    The vacuum valve bellows 8 described above, when mounted on the periphery of the rod 7 of the vacuum valve, is designed such that the axial length of the bellows 8 when the valve element 6 is in a position in contact with the valve seat 5 , which corresponds to free length of the bellows 8 itself. If the free length of the bellows is designed this is advantageous because then the bellows 8 can be mounted in an uncompressed state in the vacuum valve, but it is unfavorable because then the amount of compressive deformation of the bellows 8 when the valve element 6 in the is fully open position, is greater than in the case where the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat 5, the maximum voltage acting on the bellows 8 is increased by the corresponding amount. Nevertheless, it can be said that this is an effective means for preventing damage to the bellows 8 because, as described above, the fluctuation rate of the applied stress can be reduced as compared with the conventional example, and it can be said that the maximum voltage itself, just by setting the R quotients in the range of 1.15 to 1.70, can also be reduced.
    Moreover, it is also possible, as described above, not to choose the free length of the bellows 8 so that the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat 5, the free Length of the bellows 8 itself corresponds, but to be chosen so that the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat 5 corresponds to the extended free length of the bellows, in which the valve element 6 in contact comes with the valve seat 5, and such that the axial length of the bellows 8, when the valve element 6 is in the fully open position corresponds to the compressed by the total deflection amount free length of the bellows 8.
    In this case, for example, the case where the axial length of the bellows 8, when the valve element 6 is in the fully open position, is the same as that with respect to the maximum deflection length (the maximum stroke of the valve element 6) by 75% compressed length of the bellows 8, and the case where the axial length of the bellows 8, when the valve element 6 is in a position in contact with the valve seat 5, is the same as that of the maximum deflection length 25% apart length of the bellows 8, these cases should be referred to here as cases with a compression ratio of 75%, using the value "75%" on the compression side of the bellows. 8
    In accordance with this expression, in the example described above with reference to Table 1 and FIG. 4, the compression ratio of the bladder 8 is 100%.
    Next, with reference to Tables 2 and 3 and the accompanying Figures 5 and 6, effective R quotients and others will be described when the compression ratio is 75% and 50%, respectively. the case that the axial length of the bellows 8, when the valve element 6 is in the fully open position, corresponds to a length of displacement (the maximum stroke of the valve element 6) of the bellows of 75% and 50% compressed length.
    It should be noted that, although the bellows test pieces in Tables 2 and 3 are exactly the same as those described in connection with the data of Table 1 above, the listed templates are a selection that can only be used with some of the templates 1 to 14 from Table 1 correspond. Tables 2 and 3 show, in the same way as in the case of Table 1, the voltage and the voltage amplitude in each of the areas a to d for each working document. Tables 2 and 3 show the data for the cases where the compression ratio is 75% and 50%. That is, in Tables 1 to 3, because the deflection of the valve element 6 is 40 mm, and the deflection of the bellows 8 when the valve element 6 is fully opened is set to 40 mm, 30 mm and 20 mm respectively, the compression ratios are in the cases of Tables 1 to 3, corresponding to 100, 75 and 50.
    5 and 6 are graphs of the voltage amplitude in each region a to d according to Tables 2 and 3 in dependence on the R-quotient, analogous to the case where, with reference to Table 1 and Fig. 4, the compression ratio is 100% , described. When compared with Fig. 4, the change of the voltage amplitude in each of the areas a to d clearly shows the same tendency for each case. Accordingly, it can be said that an R-quotient of the bellows 8 in the value range of 1.15 to 1.70 is effective in order to balance the stress acting in the valley regions 21 and the mountain regions 22 as equally as possible regardless of the compression quotient , It is true for a particularly preferred case that the R quotient is in the range of 1.20 to 1.55.
    Moreover, it is apparent from Tables 1 to 3, as well as from the contents of Fig. 7, which show the maximum voltages in response to the change in the R quotient when the compression ratios are 100, 75 and 50, as shown in Tables 2 and 3, in which the compression ratios are 75 and 50, the maximum stresses become lower than those with the compression ratio 100 of Table 1.
    It should be noted in Fig. 7 that the maximum voltage shows a low value when the compression ratio is 50% and the R quotient is around 1.0 to 5.0; Therefore, it can be said that this range of values is very effective to prevent damage to the bellows.
    Moreover, the compression ratio data shown above make it apparent that it is possible to provide a bellows with which damage is effectively prevented by providing the expanded length of the bellows 8 when the valve member 6 is in a position of contact with the valve seat 5 is the same size (a compression ratio of 50%) or less than (a compression ratio of 50% or more), the compressed length of the bellows 8, when the valve element 6 is in the fully open position is selected.
    Table 2
    权利要求:
    Claims (6)
    [1]
    Table 3

    claims
    A vacuum valve with a bellows (8), comprising a disc-shaped valve element (6) and a valve seat (5), such that a main flow path (2) can be opened or closed by the disc-shaped valve element (6) by the valve element (6 ) can be in contact with or move away from the valve seat (5), which vacuum valve comprises a first main connection (3) and a second main connection (4) and has a drive unit (10) to connect the valve element (6) via a To drive rod (7), wherein the bellows (8) is fixed to the valve element (6) and a support plate, that the rod (7) is sheathed to that between the first (3) and the second (4) main terminal extending Main flow path (2) to be separated from the drive unit (10), wherein the bellows (8) is formed of a metallic tube, such that this alternately and continuously in the axial direction and along the wall of this metallic tube with ringförmi Valley valley areas (21), which in this metallic tube bulge inward and is provided with annular mountain areas (22) which bulge outwardly in this metallic tube, and wherein Tal R / Mountain R, which of Quotient from valley R to mountain R is in the range of values of 1.15 and 1.70, where valley R is the radius of the course of the valley area (21) in vertical cross-section, and mountain R is the radius of the course of the mountain area (22) in the vertical cross section, in a state in which no external forces from the rod (7) act on the bellows (8).
    [2]
    2. Vacuum valve according to claim 1, characterized in that valley R / mountain R, which is the quotient of valley R to mountain R, in the value range of 1.20 and 1.55.
    [3]
    3. A vacuum valve according to claim 1 or 2, characterized in that the axial length of the bellows (8) corresponds to the free length of the bellows (8) when the valve element (6) is in a position in contact with the valve seat (5) and the free length of the bellows (8) is compressed by a total amount of deflection when the valve member (8) is in a fully open position.
    [4]
    4. A vacuum valve according to claim 1 or 2, characterized in that, when the valve element (6) is in a position in contact with the valve seat (5), the bellows (8) is in a state in which it over the free length of the bellows (8) is extended, and when the valve element (6) is in a fully open position, the bellows (8) is compressed by a total deflection amount from the free length of the bellows (8).
    [5]
    5. A vacuum valve according to claim 4, characterized in that, when the valve element (6) is in a position in contact with the valve seat (5), the length at which the bellows (8) is stretched, equal to or less than the length is about which the bellows (8) is compressed when the valve element (6) is in the fully open position.
    [6]
    6. Vacuum valve according to one of claims 1 to 5, characterized in that the metallic tube which forms the bellows (8) is formed by deep drawing of stainless steel.
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    US20120286178A1|2012-11-15|
    TWI541466B|2016-07-11|
    US8807531B2|2014-08-19|
    KR101498544B1|2015-03-04|
    CH704934A2|2012-11-15|
    KR20120127293A|2012-11-21|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US1756911A|1925-12-03|1930-04-29|Gen Motors Res Corp|Metallic bellows|
    US3302878A|1965-11-30|1967-02-07|Fujiwara Katsuji|Thermo-synchronous steam trap|
    US3787023A|1971-08-05|1974-01-22|Nupro Co|Bellows valve|
    JPS5324625B2|1973-09-25|1978-07-21|
    JPH0533485B2|1985-08-29|1993-05-19|Mitsubishi Electric Corp|
    GB8909289D0|1989-04-24|1989-06-07|Crane John Uk Ltd|Mechanical face seals|
    ES2193694T3|1998-04-11|2003-11-01|Tuchenhagen Gmbh|ELEVATION VALVE.|
    JP2003139284A|2001-11-01|2003-05-14|Nabco Ltd|Joint and joint structure|
    NO20025536D0|2002-11-18|2002-11-18|Norsk Hydro As|Flexible tubing, e.g. a tube bellows|
    JP4171900B2|2003-05-19|2008-10-29|Ｓｍｃ株式会社|Vacuum pressure control valve|
    JP2006079989A|2004-09-10|2006-03-23|Toshiba Corp|Vacuum valve|
    JP4862987B2|2006-01-19|2012-01-25|Ｎｏｋ株式会社|Metal bellows type accumulator|
    JP5066724B2|2007-01-17|2012-11-07|Ｓｍｃ株式会社|High vacuum valve|
    JP5144382B2|2008-06-17|2013-02-13|三菱電機株式会社|Vacuum valve|
    JP5324625B2|2011-07-08|2013-10-23|株式会社明治|Method for producing baked oily confectionery|
    JP6251120B2|2014-05-20|2017-12-20|積水化学工業株式会社|Pipe connection method|GB201816364D0|2018-10-08|2018-11-28|Rolls Royce Plc|A controller assembley|
    法律状态:
    2017-03-15| AZW| Rejection (application)|
    2020-05-29| AEN| Modification of the scope of the patent|Free format text: :DIE PATENTANMELDUNG IST AUFGRUND DES WEITERBEHANDLUNGSANTRAGS VOM 09.05.2017 REAKTIVIERT WORDEN. |
    优先权:
    申请号 | 申请日 | 专利标题
    JP2011108403A|JP2012237426A|2011-05-13|2011-05-13|Vacuum valve bellows|
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